Apparatus for producing fluoride crystal

ABSTRACT

An apparatus for producing a fluoride crystal, which has a chamber, a window material and the like capable of dealing with the fluoride, is equipped with facilities necessary for high vacuum evacuation, and uses a crucible in which the capillary portion of the hole formed in the bottom thereof is so controlled for a seed crystal and a molten material to be easily contacted to each other; and a method for producing a fluoride crystal comprising using the apparatus. The apparatus allows the production of a single crystal of a fluoride having high quality in a extremely short time with stability.

TECHNICAL FIELD

The present invention relates to an apparatus for producing a fluoridecrystal and to a method for producing the same.

BACKGROUND ART

(Patent Document 1)

Japanese Unexamined Patent Application Publication No. 11-130594

(Patent Document 2)

Japanese Unexamined Patent Application Publication No. 10-265293

(Patent Document 3)

Japanese Unexamined Patent Application Publication No. 8-259375

(Non-Patent Document 1)

Handbook of Applied Physics, 2nd edition, Maruzen, p. 427

With the increased high density integration of semiconductor elements,light sources employed in the various aspects of semiconductorfabrication come to use a beam having an ever shorter wavelength. Demandfor a beam with a shorter wavelength currently reaches as far as therealm of vacuum ultraviolet rays. For the optical materials handling abeam with such a short wavelength, fluoride crystals have been usedbecause of their high permeability to light. For example, for theoptical materials used in an optical lithography apparatus to emit anArF excimer laser (193 nm) or an F₂ excimer laser (157 nm), singlecrystals of fluoride such as those of calcium fluoride, barium fluorideand magnesium fluoride have been used. Besides, development of newcrystals of fluorides is urgently demanded in connection with thegeneration of ultraviolet and infrared lasers, UV cut windowpanes,optical materials for medical use, etc.

For the production of fluoride crystals, the Bridgman or CZ method hasbeen principally employed to produce single bulk crystals. This mass ofa single bulk crystal is cut into pieces according to given applicationsand measurement purposes (see, for example, Patent Document 1).Acquisition of single crystals by these methods, however, requiresenormous cost and takes several days which significantly retards theefforts for the development of new fluoride materials. This isparticularly true for the CZ method. When a fluoride crystal is grown bythis method, a seed crystal is brought into contact with the top offluoride melt. If some impurities float on the top, they must beremoved. Such impurities, if any, may lengthen further the time ofcrystal growth and affect the quality of crystal.

On the other hand, for the production of single crystals of oxides andtheir eutectic mixtures, and of Si crystals, micro-pulling-down methodhas been practiced (Patent Documents 2 and 3, and Non-Patent Document1). For example, Patent Document 2 describes a concrete apparatus basedon the method in paragraph [0025] and FIG. 1.

By using the techniques disclosed in Patent Documents 2 and 3, andNon-Patent Document 2, it is possible to grow a single crystal at a pacesignificantly higher (in the order of 1 to 2) than conventionaltechniques. These techniques enable the contraction of time necessaryfor the growth of single crystals, and production of high qualitycrystals having a significantly large size from a more limited amount ofmaterial, as compared with conventional techniques. Furthermore,according to these techniques, crystal is pulled up through a tinyperforation formed at the bottom of a crucible, which eliminates theneed for the removal of impurities floating on the surface of melt.

However, in the description of Patent Document 2, the technique isexclusively used for the production of single crystals of strongdielectric compounds such as LiNbO₃, LiTaO₃, KLN, etc. Also thetechnique described in Patent Document 3 is exclusively used for theproduction of single crystals of tungsten bronze structures representedby KLN, KLTN [K₃Li_(2−2x)(Ta_(y)Nb_(1−y))_(5+x)O_(15+x)],Ba_(1−x)Sr_(x)Nb₂O₆, etc., Mn—Zn ferrite, LiNbO₃, YAG substituted by Nd,Er or Yb, YVO₄ substituted by Nd, Er or Yb. Both the documents do notgive any mention about the production of single crystals of fluorides.

The present invention aims to provide an apparatus enabling one toproduce high quality crystals of fluorides in a very short period oftime, method for producing such crystals, and a crucible suitably usedfor the apparatus.

DISCLOSURE OF INVENTION

The apparatus of the invention for producing fluoride crystals comprisesa crucible having a perforation at its bottom, and produces a singlecrystal of fluoride by pulling down a single crystal mass from thecrucible storing a melt of a fluoride material through the perforationof the crucible, the perforation having a length of 0 to 3 mm.

The length of the perforation is preferably 0 to 2 mm, more preferably 0to 1 mm.

The crucible is made of carbon, platinum or iridium. Although carbon,platinum and iridium do not exhibit a high wettability to fluoride melt,the inventive crucible made of the above element can satisfactorilysupply a melt of fluoride to a seed crystal. The features of the presentinvention are more manifest with the crucible made of the above element.

The method of the invention can be applied to any fluorides. When afluoride chosen from calcium fluoride, barium fluoride and magnesiumfluoride must be crystallized, it is difficult by a conventional methodto avoid adverse effects inflicted by impurities and to control thecrystallization process. Thus, in the crystallization of the abovefluorides, the features of the invention become more manifest.

The diameter of the perforation is in the range of 0.1 to 5 mm. If thediameter in question is below 0.1 mm, it will be hardly possible towithdraw a single crystal through the perforation. If the diameterexceeds 5 mm, a melt of fluoride will sink through the perforation.

The crucible of the invention has, at its bottom, a perforation having alength of 0 to 3 mm.

The length of the perforation is preferably 0 to 2 mm.

The inventive crucible is a crucible for producing single crystals basedon the pulling-down method.

The inventive crucible is a crucible for producing single crystals offluorides.

The inventive crucible is made of carbon, platinum or iridium.

The inventive method for producing single crystals of fluoridescomprises producing single crystals using an apparatus.

The pulling-down speed is preferably kept in the range of 0.03 to 5mm/min. Putting the speed below 0.03 mm/min does not form a particularproblem. However, if the speed exceeds 5 mm/min, the single crystal willbe separated from the melt, and solid-liquid interface will not beformed.

Pulling-down of a single crystal is preferably performed at atemperature higher by 0 to 100° C. than the melting point of thefluoride. If the temperature is higher by a degree exceeding the aboverange than the melting point of the fluoride, the single crystal will becontaminated by impurities. Furthermore, since the temperaturedifference between solid phase and liquid phase is increased, crystaldefects (such as dislocation) will arise as a result of thermaldistortion.

(Operation)

The operation of the inventive apparatus and method will be describedbelow with reference to the experience and findings leading to theinvention.

The present inventors tried to grow a crystal of fluoride by themicro-pulling-down method, which was reported to allow the growth ofcrystal to occur at a speed higher by the order of 1 to 2 than theconventional crystal-growth-in-melt method. More specifically, thepresent inventors tried to apply the micro-pulling-down method asdescribed in Patent Document 2 to produce a crystal of fluoride asdescribed in Patent Document 1.

However, the crystal actually obtained by the above method was somewhatunsatisfactory in its crystallization. Namely, the quality of theobtained crystal was not necessarily satisfactory. The shortcomings weremore apparent when a crucible made of carbon or platinum was used.

The present inventors ardently sought for the cause responsible for theshortcomings, and came upon to a hypothesis that the cause might lie inthe insufficient contact between the melt kept in the crucible and theseed crystal or growing crystal. They further hypothesized that thecause might also lie in the insufficient supply of melt to the seedcrystal because the seed crystal is moved faster with the pulling-downmethod than with the pull-up method. The present inventors got aninsight that the fundamental cause for the shortcomings lies in theinsufficient wettability of the crucible to the melt, particularly whenthe melt is derived from a fluoride.

Factors involved in the wettability of a substance are numerous. Forexample, the temperature of a melt is increased, the viscosity of themelt is reduced, and thus the wettability of the melt is increased.However, if the temperature of a melt is increased carelessly, the seedcrystal will dissolve into the melt thereby disrupting the formation ofsolid-liquid interface, or the melt will be so ready to vaporize as tointerfere with the intended growth of crystal. Reducing the pulling-downspeed may seem to be a possible remedy for the problem, because it willensure the more secure contact between the melt and the seed crystal.However, this measure will sacrifice one of the most importantadvantages of the micro-pulling-down method, i.e., high speedcrystallization.

The present inventors studied those factors involved in the problem oneby one, and, as a result of the study, got an idea that it might bepossible to solve the problem by adjusting the length of the perforationformed on the bottom of a crucible.

The present inventors checked the construction of conventionalcrucibles, and found that scarcely any attention had been paid to thelength of the perforation formed on the bottom of the crucibles.

The present inventors constructed crucibles having a perforation of 0 to3 mm in length, and tried to grow crystals by using them. They foundthat the crucible allows the production of a single crystal excellent incrystallization, even when it is made of carbon, platinum or iridium,and the pulling-down speed is kept at a standard level, because then thecontact of the seed crystal with the melt sinking through theperforation is improved. This finding led to the invention.

According to the invention, the length of the perforation is in therange of 0 to 3 mm. By using a crucible having such a perforation asdescribed above, it is possible to produce impurity-free single crystalsof fluoride excellent in crystallization at a high speed. Preferably,the length of the perforation is 2 mm or less, because then the aboveadvantage will be more enhanced.

In conclusion, since the method of the invention allows the growth ofcrystal to occur at a speed higher by the order of 1 to 2 than aconventional crystal-growth-in-melt method, it ensures the shortening ofthe time necessary for crystal growth, and the production of highquality single crystals having a significantly large size from a limitedamount of start material.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram of an atmosphere-controlled radio waveheating micro-pulling-down apparatus.

FIG. 2 is a schematic diagram of a crucible, which has, at its bottom, aperforation whose longitudinal length is adjusted to be 0 to 3 mm.

REFERENCE NUMERALS

-   -   1. Chamber    -   2. Seed crystal    -   3. Stage    -   4. Growing crystal    -   5. After-heater    -   6. Work coil    -   7. Crucible    -   8. Thermal insulator    -   9. High vacuum evacuator    -   10. Melt    -   13. Perforation

BEST MODE FOR CARRYING OUT THE INVENTION

FIGS. 1 and 2 show an apparatus for producing crystals of fluoriderepresenting an invention of the invention.

This apparatus for producing crystals of fluoride comprises a crucible 7having a perforation 13 at its bottom, and produces a single crystal offluoride by withdrawing a single crystal mass 4 from the crucible 7storing a melt 10 of a fluoride material through the perforation 13 ofthe crucible 7, the perforation having a length of 0 to 3 mm.

The operation of the apparatus will be detailed below.

This is an apparatus obtained by modifying a conventional apparatus usedfor practicing the micro-pulling-down method to be adapted for theproduction of fluoride crystals.

This apparatus has a chamber 1. The chamber 1 is made of stainless steel(SUS 316).

An evacuator 9 is connected to chamber 1. In the particular exampleillustrated, in order to achieve high degree evacuation which is themost important for the successful growth of fluoride crystals, theevacuator 9 comprises, for example, a rotary pump with a diffusion pumpaffiliated (not illustrated). By virtue of this evacuation unit, it ispossible to maintain the evacuation of chamber 1 at 1.3×10⁻³ Pa orlower. Further, a gas inlet (not illustrated) is provided to chamber 1so that gas such as Ar can be introduced into chamber 1. Gas, when used,preferably contains impurities at 10 ppb or lower.

A window is provided to chamber 1 so that the operator can observe theinterior of the chamber. During operation, the operator can observe viaan image on a CCD applied to the window the solid-liquid interfacebetween a seed crystal 2 and a melt sinking through the perforation. Thewindow may be made of CaF₂.

A stage 3 is provided in chamber 1. A crucible 7 and an after-heater 5are placed on stage 3.

Around the wall of crucible 7, two layers of thermal insulators 8 areprovided. The crucible 7 is then covered with a work coil 6. The workcoil is provided for melting a fluoride material placed in crucible 10.

A perforation is provided at the bottom of crucible 7, and a seedcrystal is placed opposite to the perforation. The seed crystal 2 ispulled down by means of a pulling-down rod. Crystal grows around theseed crystal, and around the periphery of the growing crystal theaftercare heater 5 is provided to prevent the crystal against from beingcooled suddenly which would cause thermal distortion.

The crucible 7 is so constructed as to let the perforation 13 formed atits bottom have a length of 0 to 3 mm as shown in FIG. 2. The lowest endof crucible may have a profile like that of a cone to facilitate thesinking of melt. The summit of the cone is then perforated to form apassage. Since the crucible must have certain strength, its bottom has acertain thickness. However, even if the thickness of the bottom is 3 mmor more, it is possible to prepare a perforation having a length of 0 to3 mm at the bottom of such a crucible, by cutting the summit of the coneat an appropriate level (by cutting the summit along a horizontal planefor the crucible depicted in the figure).

EXAMPLE Example 1

An apparatus as shown in FIG. 1 was used to produce a crystal of calciumfluoride.

A crucible 7 made of highly pure carbon having a perforation (diameter,1 mm; longitudinal length, 0 mm) at its bottom was prepared. The lengthof the perforation was chosen to facilitate the contact of a seedcrystal with melt. A powder of calcium fluoride was transferred to thecrucible 7, and a seed crystal 2, stage 3, after-heater 5 and thermalinsulator 8 were set as shown in FIG. 1, and an oil-circulation pump andan oil-diffusion pump were driven to evacuate air, thereby producing ahigh degree vacuum there.

After confirming that the degree of vacuum is 1.3×10⁻³ Pa or lower, Argas was allowed to flow into chamber 1, in effect, air in the chamberwas substituted for Ar. Then, the chamber was heated by means of aradio-wave coil 6 to melt the powder of calcium fluoride. The meltedcalcium fluoride was maintained at 1450° C.

The bottom of crucible 7 was monitored with a CCD camera, and afterconfirming that the melt emerging from the perforation formed at thebottom of crucible 7 came into contact with the seed crystal, the seedcrystal was pulled down while keeping the melt in contact with the seedto crystallize.

The solid-liquid interface was monitored with the CCD camera, and thepulling-down speed was adjusted such that a final speed of 0.5 mm/minwas attained. In the end, a colorless, clear crystal of CaF₂ in the formof a cylinder with a diameter of 1 mm and length of 100 mm was obtained.

Example 2

In this example, the length of the perforation was varied between 0 and5 mm.

When the length of the perforation was 5 or 4 mm, the melt 10 was notsupplied to the seed crystal 2 and thus crystal failed to grow.

When the length of the perforation was 3.5 mm, the melt 10 came intocontact with the seed crystal 2. However, the contact was not maintainedconstantly, and thus a single crystal excellent in crystallization wasnot obtained.

When the length of the perforation was 3, 2 or 1 mm, the melt 10 cameinto contact with the seed crystal 2. Of the single crystals obtained,their lattice deformations were evaluated. Single crystals obtained fromcrucibles whose perforation had a length of 2 mm or less hardlyexhibited lattice deformations. Single crystals obtained from crucibleswhose perforation had a length of 3 mm exhibited a few latticedeformations.

INDUSTRIAL APPLICABILITY

According to the present invention, it becomes possible to obtain a highquality single crystal of fluoride at a high speed.

1. An apparatus for producing a fluoride crystal comprising a crucible having a perforation at its bottom, said apparatus producing a single crystal of fluoride by pulling down a single crystal from the crucible storing a melt of a fluoride material through the perforation of the crucible, the perforation having a length of 0 to 3 mm.
 2. The apparatus according to claim 1 wherein the length of the perforation is made 0 to 2 mm.
 3. The apparatus according to claim 1 wherein the crucible is made of carbon, platinum or iridium.
 4. The apparatus according to claim 1 wherein the fluoride is one chosen from the group comprising calcium fluoride, barium fluoride and magnesium fluoride.
 5. The apparatus according to claim 1 wherein the diameter of the perforation is in the range of 0.1 to 5 mm.
 6. A crucible which has, at its bottom, a perforation having a length of 0 to 3 mm.
 7. The crucible according to claim 6 wherein the perforation has a length of 0 to 2 mm.
 8. The crucible according to claim 6 which is for producing a single crystal by the pulling-down method.
 9. The crucible according to claim 6 which is for producing a single crystal of a fluoride.
 10. The crucible according to claim 6 which is made of carbon, platinum or iridium.
 11. A method for producing single crystals of fluorides comprising using an apparatus as described in claim 1 for producing a single crystal of a fluoride.
 12. The method according to claim 11 wherein the pulling-down speed of a seed crystal is 0.03 to 5 mm/min.
 13. The method according to claim 11 wherein the pulling-down is performed while the temperature of the melt is kept higher by 0 to 100° C. than the melting point of the fluoride to be crystallized. 